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WSC
2001
14 years 11 months ago
Implementation of response surface methodology using variance reduction techniques in semiconductor manufacturing
Semiconductor manufacturing is generally considered a cyclic industry. As such, individual producers able to react quickly and appropriately to market conditions will have a compe...
Charles D. McAllister, Bertan Altuntas, Matthew Fr...
WSC
2000
14 years 11 months ago
Analyzing transformation-based simulation metamodels
We present a technique for analyzing a simulation metamodel that has been constructed using a variancestabilizing transformation. To compute a valid confidence interval for the ex...
Maria de los A. Irizarry, Michael E. Kuhl, Emily K...