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106
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DAC
2004
ACM
16 years 2 months ago
2004
ACM
Resolution enhancement techniques (RET) such as optical proximity correction (OPC) and phase-shift mask (PSM) technology are deployed in modern processes to increase the fidelity ...
144
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TASE
2008
IEEE
15 years 1 months ago
2008
IEEE
Applications such as layered manufacturing, or in general, solid free-form fabrication, pose a major challenge on online process control. For these parts to be functional, it is i...
97
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WADS
1997
Springer
15 years 6 months ago
1997
Springer
62
Voted
CCCG
2004
15 years 3 months ago
2004
60
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CACM
2005
15 years 1 months ago
2005