Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are mi...
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vi...
The influence of thermal effects on the reliability of RF MEMS switches is investigated in this paper. Low power consumption and capacity to handle high power at very high frequen...
Jonathan Lueke, Noor Al Quddus, Walied A. Moussa, ...
Visualizations are a crucial component in CAD systems, typically displaying design layout or physical behavior. In this paper we introduce in an innovative way visualizations, tha...
— We describe a potentiostat designed for in situ electrochemical control of MEMS actuators. This module is tailored for integration into a hybrid CMOS-MEMS system-ona-chip to co...
S. B. Prakash, Pamela Abshire, M. Urdaneta, M. Chr...