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» Modeling Tool Failures in Semiconductor Fab Simulation
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WSC
2008
14 years 12 months ago
Simulation analysis of cluster tool operations in wafer fabrication
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva...
WSC
2001
14 years 11 months ago
Graphical methods for robust design of a semiconductor burn-in process
Discrete-event simulation is a common tool for the analysis of semiconductor manufacturing systems. With the aid of a simulation model, and in conjunction with sensitivity analysi...
Scott L. Rosen, Chad A. Geist, Daniel A. Finke, Jy...
WSC
2004
14 years 11 months ago
An Event Graph Based Simulation and Scheduling Analysis of Multi-Cluster Tools
Simulation methods are extensively used in modeling complex scheduling problems. However, traditional layout of simulation models can become complicated when they are used to find...
Shengwei Ding, Jingang Yi
WSC
2004
14 years 11 months ago
Comparative Factory Analysis of Standard FOUP Capacities
Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...
Kranthi Mitra Adusumilli, Robert L. Wright
WSC
2001
14 years 11 months ago
Sizing a pilot production line using simulation
The semiconductor industry is rapidly expanding worldwide. With the continuing advancement of technology, companies are continually striving to develop and maintain cutting edge p...
Peng Qu, Geoffrey E. Skinner, Scott J. Mason