Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva...
Discrete-event simulation is a common tool for the analysis of semiconductor manufacturing systems. With the aid of a simulation model, and in conjunction with sensitivity analysi...
Scott L. Rosen, Chad A. Geist, Daniel A. Finke, Jy...
Simulation methods are extensively used in modeling complex scheduling problems. However, traditional layout of simulation models can become complicated when they are used to find...
Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...
The semiconductor industry is rapidly expanding worldwide. With the continuing advancement of technology, companies are continually striving to develop and maintain cutting edge p...