72 search results - page 7 / 15 » Modeling Tool Failures in Semiconductor Fab Simulation |
WSC
2000
14 years 11 months ago
2000
Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules and task response priorities of ...
ITC
2003
IEEE
15 years 2 months ago
2003
IEEE
Failure analysis (FA) and diagnosis of memory cores plays a key role in system-on-chip (SOC) product development and yield ramp-up. Conventional FA based on bitmaps and the experi...
MR
2006
14 years 9 months ago
2006
The intrinsic failure mechanisms and reliability models of state-of-the-art MOSFETs are reviewed. The simulation tools and failure equivalent circuits are described. The review in...
WSC
2001
14 years 11 months ago
2001
Simulations often execute too slowly to be effective tools for decision-making. In particular, this problem has been found in semiconductor manufacturing where conventional job-dr...
WSC
2008
14 years 12 months ago
2008
Cluster or chamber tools are often used in the semiconductor industry. In a research environment, moving to smaller device dimensions requires experimentation with new chamber typ...