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87
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WSC
2004
14 years 11 months ago
Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
Michael E. Kuhl, Julie Christopher
74
Voted
WSC
2008
14 years 12 months ago
An analytical model for conveyor based AMHS in semiconductor wafer fabs
This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is ...
Dima Nazzal, Andrew Johnson, Hector J. Carlo, Jesu...
WSC
2000
14 years 11 months ago
Automated material handling system traffic control by means of node balancing
This paper presents a logistic algorithm that improves traffic conditions in a network-like automated material handling system (AMHS). The algorithm uses a lookahead procedure and...
Namdar Bahri, Robert J. Gaskins
67
Voted
WSC
2000
14 years 11 months ago
Simulation based decision support for future 300mm automated material handling
Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...
Mathias Schulz, Timothy D. Stanley, Bernhard Renel...