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    ISBI
    2004
    IEEE
    138views Medical Imaging» more  ISBI 2004»
    Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization
    16 years 2 months ago
    Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization
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    Lingli Liu, Osama Mukdadi, Hyoung Bum Kim, Jean R....
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