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    WSC
    2008
    138views Modeling And Simulation» more  WSC 2008»
    Study of optimal load lock dedication for cluster tools
    15 years 25 days ago
    Study of optimal load lock dedication for cluster tools
    Download  www.informs-sim.org
    Cluster or chamber tools are often used in the semiconductor industry. In a research environment, moving to smaller device dimensions requires experimentation with new chamber typ...
    Julie Christopher
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