110
Voted
WSC
2000
15 years 4 months ago
2000
Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules and task response priorities of ...
117
Voted
WSC
2008
15 years 5 months ago
2008
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
118
Voted
WSC
2008
15 years 5 months ago
2008
Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput mo...