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88
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CORR
2008
Springer
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CORR 2008
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A Two-Step Etching Method to Fabricate Nanopores in Silicon
15 years 2 months ago
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documents.irevues.inist.fr
A cost effectively method to fabricate nanopores in silicon by only using the conventional wet-etching technique is developed in this research. The main concept of the proposed me...
G.-J. Wang, W.-Z. Chen, K. J. Chang
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