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    WSC
    2004
    103views Modeling And Simulation» more  WSC 2004»
    Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs
    15 years 6 days ago
    Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs
    Download  www.informs-sim.org
    A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
    Michael E. Kuhl, Julie Christopher
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