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122
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WSC
2004
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Modeling And Simulation
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WSC 2004
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Capacity Analysis of Automated Material Handling Systems in Semiconductor Fabs
15 years 4 months ago
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www.informs-sim.org
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
Michael E. Kuhl, Julie Christopher
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