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WSC
2001
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Modeling And Simulation
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WSC 2001
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Critical tools identification and characteristics curves construction in a wafer fabrication facility
15 years 4 months ago
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The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in p...
Dima Nazzal, Mansooreh Mollaghasemi
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