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WSC
2008
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Modeling And Simulation
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WSC 2008
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Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities
15 years 5 months ago
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In this paper, multiple orders per job type formation and release strategies are described for semiconductor wafer fabrication facilities (wafer fabs). Different orders are groupe...
Jens Zimmermann, Scott J. Mason, John W. Fowler, L...
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