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    WSC
    2004
    130views Modeling And Simulation» more  WSC 2004»
    Comparative Factory Analysis of Standard FOUP Capacities
    15 years 1 months ago
    Comparative Factory Analysis of Standard FOUP Capacities
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    Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...
    Kranthi Mitra Adusumilli, Robert L. Wright
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