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    128views Modeling And Simulation» more  WSC 2000»
    Simulation based decision support for future 300mm automated material handling
    15 years 7 days ago
    Simulation based decision support for future 300mm automated material handling
    Download  www.informs-sim.org
    Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions...
    Mathias Schulz, Timothy D. Stanley, Bernhard Renel...
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