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CORR
2008
Springer
90views Education» more  CORR 2008»
14 years 10 months ago
Silicon on Nothing Mems Electromechanical Resonator
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro...
Cedric Durand, Fabrice Casset, Pacal Ancey, Fabien...