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    CCE
    2006
    118views Software Engineering» more  CCE 2006»
    A multiscale systems approach to microelectronic processes
    14 years 11 months ago
    A multiscale systems approach to microelectronic processes
    Download  brahms.scs.uiuc.edu
    This paper describes applications of molecular simulation to microelectronics processes and the subsequent development of techniques for multiscale simulation and multiscale syste...
    Richard D. Braatz, Richard C. Alkire, Edmund G. Se...
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