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    CCE
    2006
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    A multiscale systems approach to microelectronic processes
    15 years 1 months ago
    A multiscale systems approach to microelectronic processes
    Download  brahms.scs.uiuc.edu
    This paper describes applications of molecular simulation to microelectronics processes and the subsequent development of techniques for multiscale simulation and multiscale syste...
    Richard D. Braatz, Richard C. Alkire, Edmund G. Se...
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