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    WSC
    2008
    115views Modeling And Simulation» more  WSC 2008»
    Simulation analysis of cluster tool operations in wafer fabrication
    15 years 15 days ago
    Simulation analysis of cluster tool operations in wafer fabrication
    Download  www.informs-sim.org
    Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
    Amit Kumar Gupta, Peter Lendermann, Appa Iyer Siva...
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