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ITC
2003
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ITC 2003
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Infrastructure IP for Back-End Yield Improvement
15 years 8 months ago
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The objective of this paper is to present an infrastructure IP (I-IP) designed to characterize yield loss in the process back-end. The I-IP structure is described in using a botto...
L. Forli, Jean Michel Portal, Didier Née, B...
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