Sciweavers
Explore
Publications
Books
Software
Tutorials
Presentations
Lectures Notes
Datasets
Labs
Conferences
Community
Upcoming
Conferences
Top Ranked Papers
Most Viewed Conferences
Conferences by Acronym
Conferences by Subject
Conferences by Year
Tools
PDF Tools
Image Tools
Text Tools
OCR Tools
Symbol and Emoji Tools
On-screen Keyboard
Latex Math Equation to Image
Smart IPA Phonetic Keyboard
Community
Sciweavers
About
Terms of Use
Privacy Policy
Cookies
129
Voted
WSC
2007
166
views
Modeling And Simulation
»
more
WSC 2007
»
An analysis of tool capabilities in the photolithography area of an ASIC fab
15 years 5 months ago
Download
www.informs-sim.org
Photolithography is generally regarded as the most constraining element in semiconductor manufacturing. This is primarily attributable to the high capital investment and extensive...
P. J. Byrne, Cathal Heavey, Kamil Erkan Kabak
claim paper
Read More »