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175
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CORR
2007
Springer
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CORR 2007
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Influence of Micro-Cantilever Geometry and Gap on Pull-in Voltage
15 years 3 months ago
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hal.archives-ouvertes.fr
In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based ...
W. Faris, H. Mohammed, M. M. Abdalla, C.-H. Ling
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