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    WSC
    2008
    160views Modeling And Simulation» more  WSC 2008»
    Impact of qualification management on scheduling in semiconductor manufacturing
    15 years 15 days ago
    Impact of qualification management on scheduling in semiconductor manufacturing
    Download  www.informs-sim.org
    A qualification management software that proposes recipe qualifications on tools in toolsets for semiconductor manufacturing has been developed. The qualification proposals are ba...
    Carl Johnzen, Philippe Vialletelle, Stéphan...
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