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WSC
2008
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Modeling And Simulation
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WSC 2008
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Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing
15 years 5 months ago
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www.informs-sim.org
Scheduling is one of the key factors for semiconductor fabrication productivity. Objectives like lot cycle time and throughput must be optimized to push the technological developm...
Andreas Klemmt, Sven Horn, Gerald Weigert, Thomas ...
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