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126
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WSC
1998
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Modeling And Simulation
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WSC 1998
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Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
15 years 4 months ago
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www.informs-sim.org
Simulation modeling provides an effective and powerful approach for capturing and analyzing complex manufacturing systems. More and more decisions are based on computer generated ...
Nirupama Nayani, Mansooreh Mollaghasemi
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