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    CPHYSICS
    2007
    64views more  CPHYSICS 2007»
    Modelling of dual-frequency capacitive discharges
    14 years 9 months ago
    Modelling of dual-frequency capacitive discharges
    Download  ccp2006.postech.edu
    We discuss electron heating mechanisms in the sheath regions of dual-frequency capacitive discharges, with the aims of identifying the dominant mechanisms and supplying closed-for...
    M. M. Turner, P. Chabert
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