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91
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CORR
2008
Springer
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CORR 2008
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An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters
15 years 3 months ago
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hal.archives-ouvertes.fr
An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip su...
P. Bruschi, V. Nurra, M. Piotto
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