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112
Voted
WSC
2008
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Modeling And Simulation
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WSC 2008
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An optimization framework for waferfab performance enhancement
15 years 5 months ago
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www.informs-sim.org
A typical wafer fab requires numerous decisions for daily operations. Even small decisions on system configurations may have significant impact on the overall fab performance. One...
Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oli...
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