Sciweavers

    ISPD
    1999
    ACM
    88views Hardware» more  ISPD 1999»
    Subwavelength optical lithography: challenges and impact on physical design
    15 years 7 months ago
    Subwavelength optical lithography: challenges and impact on physical design
    Download  vlsicad.ucsd.edu
    We review the implications of subwavelength optical lithography for new tools and ows in the interface between layout design and manufacturability. After discussing the necessity ...
    Andrew B. Kahng, Y. C. Pati
    claim paper
    Read More »
    Explore & Download
    Proceedings Preprints Top 5 Ranked Papers Publications Books Software Tutorials Presentations Lectures Notes Datasets
    Productivity Tools
    i2PDF i2Img i2Text i2OCR i2Symbol i2Type i2Speak i2Style i2Arabic i2Bopomo Latex Equation Editor
    Sciweavers
    About Community Cookies Privacy Policy Terms of Use

    Copyright © Sciweavers LLC, 2009-2026, USA.