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DAC
2011
ACM

AENEID: a generic lithography-friendly detailed router based on post-RET data learning and hotspot detection

9 years 4 months ago
AENEID: a generic lithography-friendly detailed router based on post-RET data learning and hotspot detection
In the era of deep sub-wavelength lithography for nanometer VLSI designs, manufacturability and yield issues are critical and need to be addressed during the key physical design implementation stage, in particular detailed routing. However, most existing studies for lithography-friendly routing suffer from either huge run-time due to the intensive lithographic computations involved, or severe loss of quality of results because of the inaccurate predictive models. In this paper, we propose AENEID - a fast, generic and high performance lithography-friendly detailed router for enhanced manufacturability. AENEID combines novel hotspot detection and routing path prediction techniques through modern data learning methods and applies them at the detailed routing stage to drive high fidelity lithography-friendly routing. Compared with existing litho-friendly routing works, AENEID demonstrates 26% to 66% (avg. 50%) of lithography hotspot reduction at the cost of only 18%-38% (avg. 30%) of ru...
Duo Ding, Jhih-Rong Gao, Kun Yuan, David Z. Pan
Added 18 Dec 2011
Updated 18 Dec 2011
Type Journal
Year 2011
Where DAC
Authors Duo Ding, Jhih-Rong Gao, Kun Yuan, David Z. Pan
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