Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering ...
Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis S...
Large-scale process variations can significantly limit the practical utility of microelectro-mechanical systems (MEMS) for RF (radio frequency) applications. In this paper we desc...
Fa Wang, Gokce Keskin, Andrew Phelps, Jonathan Rot...
CMOS-MEMS integration can improve the performance of the MEMS (micro-electromechanical systems), allows for smaller packages and leads to a lower packaging and instrumentation cos...
- In this article, a set membership (SM) identification technique is tailored to detect faults in microelectromechanical systems. The SM-identifier estimates an orthotope which con...