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ITC
2003
IEEE
145views Hardware» more  ITC 2003»
13 years 10 months ago
MEMS Manufacturing Testing: An Accelerometer Case Study
Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering ...
Theresa Maudie, Alex Hardt, Rick Nielsen, Dennis S...
DAC
2012
ACM
11 years 7 months ago
Statistical design and optimization for adaptive post-silicon tuning of MEMS filters
Large-scale process variations can significantly limit the practical utility of microelectro-mechanical systems (MEMS) for RF (radio frequency) applications. In this paper we desc...
Fa Wang, Gokce Keskin, Andrew Phelps, Jonathan Rot...
ICCAD
2006
IEEE
152views Hardware» more  ICCAD 2006»
13 years 11 months ago
CMOS-MEMS integration: why, how and what?
CMOS-MEMS integration can improve the performance of the MEMS (micro-electromechanical systems), allows for smaller packages and leads to a lower packaging and instrumentation cos...
Ann Witvrouw
ICRA
2006
IEEE
99views Robotics» more  ICRA 2006»
13 years 11 months ago
Application of Set Membership Identification for Fault Detection of MEMS
- In this article, a set membership (SM) identification technique is tailored to detect faults in microelectromechanical systems. The SM-identifier estimates an orthotope which con...
Vasso Reppa, Anthony Tzes