Large-scale process variations can significantly limit the practical utility of microelectro-mechanical systems (MEMS) for RF (radio frequency) applications. In this paper we desc...
Fa Wang, Gokce Keskin, Andrew Phelps, Jonathan Rot...
The long term impact of MEMS technology will be in its ability to integrate novel sensing and actuation functionality on traditional computing and communication devices enabling t...
MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEM...
Designers of SoCs with non-digital components, such as analog or MEMS devices, can currently use high-level system design languages, such as SystemC, to model only the digital par...
Ankush Varma, Muhammad Yaqub Afridi, Akin Akturk, ...
In this work, we report on an unprecedented design where digital, analog, and MEMS technologies are combined to realize a generalpurpose single-chip CMOS microsystem. The converge...
Robert M. Senger, Eric D. Marsman, Michael S. McCo...