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ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
A two-wire test strategy with simultaneous bidirectional data flow and an independent clock line enables very high site count low-cost wafer probing.
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures...
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
MEMS components by their very nature have different and unique failure mechanisms than their macroscopic counterparts. This paper discusses failure mechanisms observed in various ...
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEM...
ITC
2003
IEEE
13 years 10 months ago
2003
IEEE
Many of the tools and techniques used to evaluate and characterize ICs can be applied to MEMS technology. In this paper we discuss various tools and techniques used to provide str...