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MJ   2006
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2006
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13 years 2 months ago
Diaphragm design guidelines and an optical pressure sensor based on MEMS technique
The design guidelines for micro diaphragm-type pressure sensors have been established by characterization of the relationships among diaphragm thickness, side length, sensitivity,...
Xiaodong Wang, Baoqing Li, Onofrio L. Russo, Harry...
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