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CPHYSICS
2007
2007
Kinetic plasma simulations for three dielectric etchers
Real-time Traffic| Added | 13 Dec 2010 |
| Updated | 13 Dec 2010 |
| Type | Journal |
| Year | 2007 |
| Where | CPHYSICS |
| Authors | Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee |
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