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MICROMACHINES
2010
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MICROMACHINES 2010
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High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
14 years 11 months ago
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eprints.eemcs.utwente.nl
Edin Sarajlic, Christophe Yamahata, Erwin Berensch
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20 May 2011
Updated
20 May 2011
Type
Journal
Year
2010
Where
MICROMACHINES
Authors
Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita, Gijs Krijnen
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