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MICROMACHINES
2010
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High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology

14 years 11 months ago
High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Edin Sarajlic, Christophe Yamahata, Erwin Berensch
Added 20 May 2011
Updated 20 May 2011
Type Journal
Year 2010
Where MICROMACHINES
Authors Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita, Gijs Krijnen
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