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    CPHYSICS
    2007
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    Kinetic plasma simulations for three dielectric etchers

    15 years 9 days ago
    Kinetic plasma simulations for three dielectric etchers
    Download  armis.postech.ac.kr
    Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee
    claim paper
    Added 13 Dec 2010
    Updated 13 Dec 2010
    Type Journal
    Year 2007
    Where CPHYSICS
    Authors Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee
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