72 search results - page 5 / 15 » Modeling Tool Failures in Semiconductor Fab Simulation |
WSC
2008
14 years 12 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
WSC
2008
14 years 12 months ago
2008
Semiconductor industry is capital intensive and competitive, and thus efficiently utilizing resources to provide products and services is essential for maintaining competitive adv...
CCE
2006
14 years 9 months ago
2006
This paper discusses the development of a set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process desig...
WSC
2001
14 years 11 months ago
2001
The purpose of this research was to identify the factors in a wafer fabrication facility that significantly affect the cycle times of two main technologies that are currently in p...
WSC
2008
14 years 12 months ago
2008
A qualification management software that proposes recipe qualifications on tools in toolsets for semiconductor manufacturing has been developed. The qualification proposals are ba...